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Iordanov, Petar, Ringwood, John and Doherty, Sean (2005) Nonlinear Control Design for a Plasma Process. 44th IEEE Conference on Decision and Control and the European Control Conference, 2005. pp. 2380-2385.
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Abstract
This paper presents a nonlinear control design for
a first-principles based model of an argon plasma process. In
this study, a Hammerstein-type structure was employed as a
basis for a feedback control design. Artificial neural networks were used to accurately model the static nonlinearity. In the developed Hammerstein model, variations in the process dynamics were accounted for by considering parametric uncertainty. A control design strategy based on μ-synthesis was applied to deliver good tracking performance and disturbance rejection.
| Item Type: | Article |
|---|---|
| Keywords: | Nonlinear Control Design; Plasma Process; |
| Academic Unit: | Faculty of Science and Engineering > Electronic Engineering |
| Item ID: | 1951 |
| Depositing User: | Professor John Ringwood |
| Date Deposited: | 25 May 2010 15:48 |
| Journal or Publication Title: | 44th IEEE Conference on Decision and Control and the European Control Conference, 2005 |
| Publisher: | IEEE |
| Refereed: | Yes |
| Related URLs: | |
| URI: | https://mu.eprints-hosting.org/id/eprint/1951 |
| Use Licence: | This item is available under a Creative Commons Attribution Non Commercial Share Alike Licence (CC BY-NC-SA). Details of this licence are available here |
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